Semiconductor TestingTemperature Control Units

Water Cooled / Air Cooled / Low & High TemperatureUsed for Semiconductor production process and testing linksDiffusion，Lithography，Etching，Lon Implantation，Thin film deposition.REQUEST A QUOTE

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Semiconductor test process temperature control

Chillers

Temp control in semiconductor production process and testing process

Dynamic Temperature Control

Fluorinated liquid temperature control minimum -100℃

Data Center Liquid Cooling

Data center liquid cooling solutionsCold plate type 15kW and cabinet type 300kW

Thermal Thuck

Each system includes a chuck and heating and cooling temperature control unit

Gas Condensation Recovery

Reduce the temperature of the exhaust gas in the induced draft fan pipe, liquefy it and collect it in a collection tank.

DETAILED EXPLANATION OF EQUIPMENT APPLICATION CASES

Chillers OEM | Explosion-proof Customization| Recirculating Chillers for Semiconductor | Maintenance Management | Platform Upgrade

SUNDI series used for VCSEL Ievel burn in platform

Used for low-temperature and high-temperature aging testing of materials, cooling and heating of semiconductor equipment, and constant temperature control of vacuum chamber refrigeration and heating. The temperature range is from -120℃ to 350℃, and the high temperature cooling technology can directly cool down from 300℃.
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LX series used for semiconductor material manufacturing

Equipped with a heating and cooling integrated container, the heat exchange area is large, the speed of heating and cooling is fast, and the demand for heat transfer oil is relatively small. High temperature cooling technology, 300℃~50℃, can be customized explosion-proof series Ex d IIB T4
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LT series is used for Wafer transfer equipment

The ethylene glycol mixed with water can be used for circulating refrigeration to save water resources. The temperature difference between on and off compressor can be set. High-performance circulating pump, no problem running 24 hours a day.
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